PNG  IHDR7PLTEU~ pHYs+ IDATXŘͭp Ã8pd6!`F5v1%n3&\FF kˀMF01FgsLy<ܤp3GH8DVlU꜁H1 ?.&U:Hxӧ4_V֠&+léHyI; k`QF+3NԽU`ļ5mA90 3J!.`@rMvav21X"hz_21SMIC5.0  F^eꆱT&qDڷBLSX d#9t=Q9JBMC cb\DHZ&]i[ՙ31:[ 5pGh eɨYD 'Τqe<$j?1& l˫ԩTlDQƖkQ/kW5 Fֶ^֘#U^&V5wV ÝwZƖ!՟hآw%."2 |xmlIs IENDB`